| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processor capable of withdrawing a substrate without stopping the entire device even when defects in the substrate are found after the substrate is input. SOLUTION: A carrier L1 is in the middle of being conveyed from a preliminary position P2 to a process preparing position P3 by a substrate conveying robot, and a carrier L2 stands by at the preliminary position P2, and further a carrier L3 is preparing for conveyance at a carrier mounting position P1. At this time, when an operator found out defects in the carrier L3, he pushs an input stopping buttom. Then, a master controller sets a carry-in door in an openable state, and in the carrier L3 which has not yet been input for confirmation and is not started conveying, the master controller sets it as a process releasing state. Then, even if the input stopping bottom is pushed, in the carriers L1, L2 in which a confirmation input is ended and the conveying process by the substrate conveying robot states, the process is not influenced. |
