| 摘要 |
<p>A wafer transportation apparatus (22) includes means (24) for storing wafers (R) and means (25, 26) for carrying wafers (R) between the means (24) and an apparatus (16) that uses wafers (R). The means (24) for storing wafers has openings (30, 31) toward two or more directions, through which wafers (R) are transferred. Since no additional location is required to bring wafers (R) out, the area occupied by the apparatus (22) can be reduced, resulting in a reduction in the time required for wafer transportation.</p> |
