PROBE,申请号JP19980130163-传众专利搜索

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发明名称	PROBE
摘要
申请公布号	JPH11326348(A)	申请公布日期	1999.11.26
申请号	JP19980130163	申请日期	1998.05.13
申请人	NIKON CORP	发明人	SUZUKI YOSHIHIKO;NAKANO KATSUSHI
分类号	G01N37/00;G01Q60/38;(IPC1-7):G01N37/00	主分类号	G01N37/00
代理机构		代理人
主权项
地址

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