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发明名称
摘要
申请公布号	JP2986141(B2)	申请公布日期	1999.12.06
申请号	JP19940085759	申请日期	1994.03.31
申请人	TOKYO EREKUTORON KK	发明人	KUJI MOTOHIRO;AKAIKE SHINJI;YOSHIOKA HARUHIKO
分类号	G01R31/26;G01R1/073;G01R31/28;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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