发明名称 Layout structure of multi-use coupling capacitors in reducing ground bounces and replacing faulty logic components
摘要 A first mask includes a well mask formed over a first portion of the wafer to define a first conductive type well in the wafer. A first polysilicon mask is formed over the well mask including a plurality of first structures and a plurality of second structures to cover a first polysilicon layer, thereby defining polysilicon gates. A first implanting mask is formed over the first polysilicon mask for forming second conductive type region. A second implanting mask is formed over the first polysilicon mask for forming first conductive type region. A second polysilicon mask is formed between gates of a second conductive type MOS and gates of a first conductive type MOS. A contact hole mask is formed over the second polysilicon mask for forming contact holes. A metal mask is formed over the contact hole mask for forming connection.
申请公布号 US5998846(A) 申请公布日期 1999.12.07
申请号 US19980050621 申请日期 1998.03.30
申请人 VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION 发明人 JAN, TZONG-SHI;LIN, YEN-TAI
分类号 H01L27/02;(IPC1-7):H01L29/72 主分类号 H01L27/02
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