发明名称 |
Layout structure of multi-use coupling capacitors in reducing ground bounces and replacing faulty logic components |
摘要 |
A first mask includes a well mask formed over a first portion of the wafer to define a first conductive type well in the wafer. A first polysilicon mask is formed over the well mask including a plurality of first structures and a plurality of second structures to cover a first polysilicon layer, thereby defining polysilicon gates. A first implanting mask is formed over the first polysilicon mask for forming second conductive type region. A second implanting mask is formed over the first polysilicon mask for forming first conductive type region. A second polysilicon mask is formed between gates of a second conductive type MOS and gates of a first conductive type MOS. A contact hole mask is formed over the second polysilicon mask for forming contact holes. A metal mask is formed over the contact hole mask for forming connection.
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申请公布号 |
US5998846(A) |
申请公布日期 |
1999.12.07 |
申请号 |
US19980050621 |
申请日期 |
1998.03.30 |
申请人 |
VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION |
发明人 |
JAN, TZONG-SHI;LIN, YEN-TAI |
分类号 |
H01L27/02;(IPC1-7):H01L29/72 |
主分类号 |
H01L27/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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