METHOD OF FABRICATING FERROELECTRIC CAPACITOR

摘要

PURPOSE: The method is to fabricate a ferroelectric capacitor simply regardless of the existence of step difference. CONSTITUTION: The method comprises the steps of: forming a TiO2 etch stop layer(12), a bottom electrode(13), a ferroelectric layer(14), a top electrode(15) and a Ti mask layer(16) on a substrate(11) in sequence; patterning the Ti mask layer; revealing the TiO2 etch stop layer by etching the top electrode, the ferroelectric layer and the bottom electrode; and removing the revealed TiO2 etch stop layer and the Ti mask layer.