发明名称 PROCEDE DE REALISATION COLLECTIVE DE TETES MAGNETIQUES INTEGREES A SURFACE PORTANTE OBTENUE PAR PHOTOLITHOGRAPHIE
摘要 The invention concerns a method which consists in depositing on a wafer (50) containing a plurality of heads, a mask (60) defining the profile of the bearing surfaces (62) and in collectively etching the wafer in the proximity of the polar parts of the heads. The invention is useful for producing magnetic heads.
申请公布号 FR2781916(A1) 申请公布日期 2000.02.04
申请号 FR19980009641 申请日期 1998.07.28
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 ALBERTINI JEAN BAPTISTE;GAUD PIERRE;BARROIS GERARD;SIBUET HENRI
分类号 G11B5/31;(IPC1-7):G11B5/33 主分类号 G11B5/31
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