发明名称 APPARATUS FOR TREATING OBJECT TO BE TREATED
摘要 PROBLEM TO BE SOLVED: To suppress formation of a backward flow region and a dead water area and to simplify the structure of an apparatus by integrally forming flow rectifying members and widening the upper parts and the lower parts of the respective holes through which a treated liquid is passed. SOLUTION: A flow rectifying plate 3 has a large number of treated liquid passing holes 3a as to form a prescribed flow rate distribution of a treated liquid and the upper parts and the lower parts of the passing holes 3a are made to be funnel-like tapered parts 3b. Consequently, the treated liquid is swiftly dispersed in the tapered parts 3b in the upper parts of the treated liquid passing holes 3a. Since the widthδof the flat parts positioned between the tapered parts 3b is shorter than the diameter of each treated liquid passing hole 3a, formation of backward flow regions and dead water regions in the upstream side of the flow rectifying plate 3 is remarkably suppressed. Moreover, owing to the funnel-like tapered parts formed in the lower parts of respective treated liquid passing holes 3a, even in the case an object to be treated is treated by changing the flow direction of the treated liquid, formation of backward flow regions and dead water regions in the downstream side of the flow rectifying plate 3 is also remarkably suppressed, resulting in excellent treatment of the object to be treated.
申请公布号 JP2000051803(A) 申请公布日期 2000.02.22
申请号 JP19980248946 申请日期 1998.09.03
申请人 DAIKIN IND LTD;TOHO KASEI KK 发明人 MAEDA TOKUO;KI KANNAN;ONO MASAO
分类号 B08B3/10;H01L21/304;(IPC1-7):B08B3/10 主分类号 B08B3/10
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