| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray radiating device capable of eliminating or reducing the fluctuation of an X-ray radiation position after a target material is replaced or due to an aging effect. SOLUTION: A laser beam 103 is converged on a target 104 by a lens 101 to generate plasma 105. The X-rays generated from the plasma 105 is radiated on a mask 110 by an illuminating optical system 109, and a mask pattern image is formed and exposed on a resist 112 by an image forming optical system 111. An X-ray pinhole camera 113 is arranged at a position symmetrical with the optical axis direction of an X-ray optical system against the normal line of the target 104. The output image of a CCD 115 is received by a control device 117 via an image pickup device 116, and the position of an X-ray source is obtained. The control device 117 moves a target moving stage 106 via a stage drive device 118, and the position of the target 104 is changed so that the position of the X-ray source lies within an allowable range. |
