| 摘要 |
PROBLEM TO BE SOLVED: To prevent degradation in film adhesion, film fatigue characteristics, and polarity holding characteristics caused by stress, for improved reliability, by using a compound comprising platinum element as an electrode. SOLUTION: The surface of a silicon substrate 101 is oxidized to form an insulating layer 102, over which titanium is used as an adhesion-strengthening film 103 against an electrode, then platinum as an electrode material, and the target of (Pb(ZrxTi1-x)O3) as an dielectrics material, to form one electrode 104 of a capacity element (a lower part electrode) and a dielectrics film 106. Here, by changing an RF power applied to a platinum target and PZT target, a composition transition region 105 wherein the ratio between platinum and the PZT constituting the dielectrics film 106 continuously changes is formed, and a specified pattern is formed as a remaining one electrode 107 of the capacity element (an upper part electrode). Thus, the stress at the interface between a dielectronics and an electrode is relaxed to prevent degradation in film adhesion, film fatigue characteristics, and polarity holding characteristics caused by the stress, resulting in improved reliability.
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