| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for combinatorial molecular layer epitaxy capable of carrying out epitaxial growth for each molecular layer and forming an inorganic superstructure, a metal or an organic superstructure and useful for efficiently searching for a substance in a short time. SOLUTION: This apparatus is equipped with a vacuum chamber 2, an ultrahigh vacuum pump 4, a substrate holder 6 holding plural substrates 5 and capable of rotating, a lamp heater 8 for heating the substrate holder 6, rotatable target tables 10 and 10 installed oppositely to the substrate holder 6, plural targets 2 of different solid raw materials, eximer laser beams 13 and 13 for vaporizing the targets 12, windows 16 and 16 for introducing the laser beams 13 and 13 into the vacuum chamber 2 an electron gun 18 of the reflection high- energy electron diffraction (RHEED) for monitoring the molecular layer epitaxial growth in situ on a thin-film growth substrate and a screen 17 of the RHEED.
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