| 摘要 |
PROBLEM TO BE SOLVED: To automatically inspect all samples produced on a production line on the production line (in-line). SOLUTION: The apparatus is provided with a detecting means 2 which has a plurality of sensors 21 (21a, 21b and 21c) for observing a surface state of a minute area of a sample S and can operate the plurality of sensors 21 selectively, and a supporting part 3 which is a member traversing the sample, can be changed in relative position to the sample and supports the sensors in a longitudinal direction thereof so that the sensors can be positioned. The sample S and supporting part 3 are relatively moved, the sensors 21 are positioned to the supporting part 3, and the sensors 21 are operated and selected to observe many fixed points on a surface of the sample. A predetermined number of the sensors are organically controlled in position and operation, so that a fixed-point observation for the sample surface is carried out at many points in place of scanning the sample surface entirely. An inspection on a production line is enabled, a measurement time is shortened, and all samples produced on the production line are automatically inspected on the production line.
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