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发明名称
摘要
申请公布号	JP3056781(B2)	申请公布日期	2000.06.26
申请号	JP19900314122	申请日期	1990.11.21
申请人		发明人
分类号	H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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