| 摘要 |
PROBLEM TO BE SOLVED: To provide a cryo-pump capable of stabilizing the degree of vacuum in a chamber in the initial period of evacuation after regeneration. SOLUTION: A cryo-pump is composed of a first panel 15 in cylindrical shape having a sealed bottom arranged in a pump body 10, a second panel 13 arranged inside the first, a second cylinder 19a coupled with the second panel 13 in such a way as covered therewith so as to cool it 13 to the temp. at which Ar makes condensation, a mounting part 19b coupled with the cylinder 19a and arranged at the bottom of the first panel 15 for mounting of the cylinder 19a, and a cover 23 coupled with the under-part of the second panel 13 for covering the mounting part 19b. Thereby the two panels 15 and 13 and the cover 23 are cooled by a heat-exchange part 18, and gas molecules to make collion with the panels 15 and 13, etc., are condensed and captured so that the inside of the chamber is evacuated.
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