MAGNETIC MAPPING SENSOR AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To make simultaneously detectable magnetic field distributions of a plane and a curved face by forming a substrate of a flexible member having non-magnetic and non-conductive properties. SOLUTION: The magnetic mapping sensor 1 has many mold type Hall elements 3 as magnetic detection elements arranged in a matrix on a flexible substrate 2 formed of a member having a flexibility and non-magnetic and non-conductive properties, e.g. a polyimide film, a polyethylene terephthalate sheet or the like. Electrodes 4 and 4' on the input side of each Hall element 3 are connected to conductors 6 and 6' on the input side and, electrodes 5 and 5' on the output side are connected to conductors 7 and 7' on the output side. Since the substrate 2 is flexible, each of the Hall elements 3 of the magnetic mapping sensor 1 can be closely attachingly arranged along a curved face even when an object to be measured has the curved face of a cylinder side face or the curved face curving in three dimensions.