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发明名称
摘要
申请公布号	JP3084307(B2)	申请公布日期	2000.09.04
申请号	JP19910232165	申请日期	1991.08.20
申请人		发明人
分类号	C23C14/48;H01J37/05;H01J37/317;H01L21/265;(IPC1-7):H01J37/317	主分类号	C23C14/48
代理机构		代理人
主权项
地址

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