| 摘要 |
PROBLEM TO BE SOLVED: To improve adsorpability, and suppress slipping-off caused by heat stress by specifying a particle diameter as adsorbent, and using activated carbon formed in a spherical shape, in a cold panel wherein the adsorbent is stuck on a coating surface of adhesive of array. SOLUTION: In a cryopump, a cold panel wherein arrays 1 are laminated in a multilayer shape is arranged, and adsorbent is stuck on one surface or both surface of the arrays 1. In this case, a particle diameter is set to 2 to 7 mm as adsorbent, and spherical activated carbon 2 is used. For example, after epoxy resin adhesive is coated on the surface side of the array 1, the spherical activated carbon 2 are spread and stuck on the coating surface. The spherical carbon 2 is also stuck on a back surface of the array 1. In the spherical activated carbon 2, 20 to 30% of the diameter thereof are buried in the adhesive layer 3, and the residual part is exposed from the adhesive layer 3. It is possible to simply stuck the adsorbent and it is also possible to surely prevent slipping-off.
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