| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card capable of promoting to increase the speed of a semiconductor integrated circuit without any problems such as lowering or damping of signal-noise ratio, or crosstalk between connecting wires. SOLUTION: This probe card has a probe 100 which contacts with an electrode 710 of a semiconductor integrated circuit 700 of a LSI or the like to be measured, a board with a wiring pattern, an electrical connecting means 300 to connect the board and the probe 100 electrically, and a shielding means 400 which is placed on the backside of the board and provides an electromagnetic shield to the connecting means 300. The shield means 400 has four insulating board 410A-410D on which conductive layers 411A-411D with one sides grounded are formed, and a plurality of penetrating holes 412A-412D penetrated by the connecting means 300 formed on the insulating board 410A-410D are provided.
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