| 摘要 |
PROBLEM TO BE SOLVED: To prevent the characteristics of an ultrasonic generation source from being deviated from an ideal state by preventing the excessive over-heat of the generation source by controlling the cooling quantity of the ultrasonic wave generation source in accordance with a detection temp. value from a temp. detecting means which is arranged in the ultrasonic wave generation source. SOLUTION: A cool gas 14 is blown at the opposite (rear surface) side of the ultrasonic generation source 1 which is stored in an applicator 10 in an ultrasonic wave propagating direction. The cooler 4 cools an ultrasonic propagating medium 8 which is filled inside a film 7 and coolant gas 5, a Peltier element or a vortex tube is used for cool gas 14. The detection temp. value from the temp. detecting means is confirmed by a sensor circuit 11 and the value is compared by a comparing part 13 with an optional threshold which is set by a threshold setting part 12. Consequently, the cooling quantity by the cooler 4 is controlled by a system controller 2 when the value from the sensor circuit 11 exceeds the threshold and the temp. of the generation source is kept within a proper range.
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