发明名称 SILICON NITRIDE CERAMIC HEATER
摘要 PROBLEM TO BE SOLVED: To improve durability by preventing the occurrence of a crack caused by thermal expansion in the vicinity of a connection terminal part 4 formed on the circumferential surface of a rod-like base body formed of a silicon nitride-based ceramics. SOLUTION: A metalized layer 12 comprising a first layer 15 and a second layer 16 on the first layer 15 is formed on the circumferential surface of a base body 1 formed of a silicon nitride-based ceramics. The first layer 15 contains at least one of V, Ti, Mo and Mn as a main constituent, and is improved in wettability, and the second layer 16 is formed of a wax material containing Au and Ni. An interlaid layer 13 of Pt or the like is formed on the second layer 16, a connection terminal 14 formed of an Fe-Ni-Co alloy is mounted on it, and a lead terminal 7 of, for instance, Ni is fixed to the connection terminal 14.
申请公布号 JP2001043962(A) 申请公布日期 2001.02.16
申请号 JP19990218125 申请日期 1999.07.30
申请人 KYOCERA CORP 发明人 UCHIMURA HIDEKI
分类号 H05B3/48;H05B3/02;(IPC1-7):H05B3/48 主分类号 H05B3/48
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