| 摘要 |
<p>A system for coupling a macroactuator to a movable element of a micromachined device, said system comprising (a) a micromachined device (11) having a movable element, (b) a first body (51) adapted for holding a macroactuator, said first body (51) having a side wall having an outer surface and a bottom having an outer surface, (c) a macroactuator (41) which has an upper end (45) and a lower end (43), and which is mechanically mounted on said first body (51), (d) a second body (61) having an upper outer surface, a lower outer surface, and a bore (62) for receiving said first body (51), the size of said bore (62) and the size of said first body (51) being such that the outer surface of the first body (51) snugly fits within said bore (62), (e) means (71, 72, 73, 75) for fixing the axial position of said first body (51) within said bore (62), and (f) means for mounting said micromachined device (11) on said second body (61) in such a way that the upper end (45) of the actuator exerts a predetermined force or pressure on said movable element of said micromachined device (11).</p> |
