摘要 |
PROBLEM TO BE SOLVED: To provide a guideless cylinder device of simple structure having a high resolution not requiring any slide guide such as rod seal. SOLUTION: In the form to suit the single motion type, a pressure chamber is formed between a diaphragm and either of a pair of cylinder bodies consolidated while diaphragm is interposed in between, and a through hole is provided in the other cylinder body, and in the through hole a piston block is provided surrounding the two cylinder bodies together with a pressure receptacle member having a pressure receptacle piston abutting to the diaphragm on its side opposite the pressure chamber, and thus the intended guideless cylinder device is structured wherein the piston block and two cylinder bodies are out of contacting in the direction perpendicular to the piston block moving direction. Also a system to suit a double motion type is established in a similar fashion.
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