| 摘要 |
PROBLEM TO BE SOLVED: To provide a transportation apparatus, an exposure method and an apparatus which can stably measure the amount of static charges on a substrate efficiently. SOLUTION: The transportation apparatus for transporting a substrate W1 to the aligner includes a first lift pin 11 for moving the substrate W1 in contact with a temperature adjuster 2 away from the adjuster 2, and a first probe 21 for measuring the amount of static charges on the substrate W1 from a side of the substrate W1 in contact with the adjuster 2. Thus, in the course of transporting the substrate W1 to an aligner 100, the apparatus measures the static charge amount and performs aligning only over the substrate W1 which is judged to have static charged amount in a predetermined range, thereby improving its productivity. |
