| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus capable of coping with substrates having any size, capable of being easily incorporated in a manufacturing line, capable of tilling the substrate and capable of reducing the load on an inspector to perform safe inspection. SOLUTION: In an inspection apparatus for inspecting the irregularity and/or flaw of the pattern formed on a large-sized substrate, a jig for feeding the substrate to a substrate inspection area and a jig for supporting the substrate are provided and an illumination means for illuminating the substrate is provided.
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