| 摘要 |
PURPOSE: An apparatus for displaying operation status is provided to directly inform malfunctions of lamps to a user by respectively connecting a number of luminescent devices to the lamps. CONSTITUTION: A wafer(20) is loaded on a basket(30) in a process chamber(10). A window(40) divides a vacuum area and a facility area for loading the wafer(20). The window(40) is made of transparent quarts to maximize heat transmission to the vacuum area. A number of lamps(50a,50b,50c) are installed in the facility area to generate heat for maintaining the temperature in the vacuum area into a uniform level. A lamp driving unit(60) powers to each of the lamps(50a,50b,50c) to drive the lamps(50a,50b,50c). A display unit(70) is installed in the process chamber(10) and it performs a lighting operation during the operation of the lamps(50,50b,50c). The operation of the display unit(70) is externally confirmed by a user.
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