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发明名称
摘要
申请公布号	JP3197325(B2)	申请公布日期	2001.08.13
申请号	JP19920088183	申请日期	1992.03.12
申请人		发明人
分类号	G01R1/00;G01R31/28;G01R31/302;G01R31/3183;G01R31/319;H01L21/66;(IPC1-7):G01R31/302;G01R31/318	主分类号	G01R1/00
代理机构		代理人
主权项
地址

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