发明名称 DRY ICE SNOW-CLEANING METHOD AND APPARATUS USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a dry ice snow-cleaning method and apparatus having convenience capable of cleaning an object to be cleaned even at any place with good cleaning efficiency without charging the object or generating dew condensation on the object. SOLUTION: Dry ice snow TS, which is formed by expanding pressurized liquefied carbon dioxide TL by a throttle mechanism 5, is ejected to the object to be cleaned from a jet orifice 8d to clean the object. In this method, gas G is ejected to the peripheral part of the jet stream of dry ice snow TS in parallel to the jet stream and the length of a flow pipeline 7 from the throttle mechanism 5 to the jet orifice 8d is adjusted to eject dry ice snow TS to clean the object.
申请公布号 JP2001259555(A) 申请公布日期 2001.09.25
申请号 JP20000077048 申请日期 2000.03.17
申请人 NIPPON SANSO CORP 发明人 SEKIHARA SHOJI;OTA HIDETOSHI
分类号 B08B5/02;B05B7/06;B24C1/00;B24C5/02;H01L21/304;(IPC1-7):B08B5/02 主分类号 B08B5/02
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