| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact plasma cleaning apparatus. SOLUTION: The plasma cleaning apparatus comprises a base 12, a guide mounted on the base 12 to guide an objedctive 6, a lid 13 which has an opening at the bottom, held with the top in an attachable/detachable manner and forms a closed space 12 when attached to the base 12, the grounded first electrode 32 provided on the lid 13, and the second electrode 34 mounted on the base 12 with a high frequency voltage applied thereto. A lower part of the second electrode 34 is opened out, and cooling means 36, 53 to cool the second electrode from the bottom are provided.
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