| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus that can form a sealed space integrated between a normal substrate processor where a substrate transfer unit is not built in and a substrate conveying unit. SOLUTION: This apparatus comprises a housing-shaped main body 11 storing the substrate W, an upper opening (a first opening) 12 that is provided on the main body 11 and is coupled with a bottom opening (a substrate transportation port) 32 of a container 3 in holding an airtight condition with the outer, a side wall opening (a second opening) 13 that is provided on the main body 11 and is coupled with the substrate transportation port 52 of a substrate processor 5 in holding the airtight condition with the outer, an exhaust pipe 15 connected with the main body 11, and an opening and shutting mechanism 16 for opening and shutting a bottom cover 33 against the bottom opening 32 in a state that the upper opening 12 and the bottom opening 32 of the container 3 are coupled, and transfer mechanisms 17, 18 for transferring the substrate W installed in the main body 11.
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