| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin vapor-deposited metalized film which enables a capacitor element using a metallized film to be set in insulating oil. SOLUTION: At the time of vapor-depositing a conductive metal 8 of zinc or aluminum on the surface of a plastic film 7, a mixed layer 9 in which the molecules constituting the plastic film 7 and the atoms constituting a thin metallic film 8 are mixed with each other. In addition, a metallic film having fine metallic grain boundaries are formed in the interface of the films 7 and 8 by irradiating the surface of the film 7 with inert gas ions of Ar, etc., with acceleration energy of 0.2-1.0 keV at a rate of 1×1015 to 1×1016 ions/cm2 and a transporting ratio of 10-250 (vapor-deposited metallic atoms/ions), so as to adjust the surface resistance of the thin film 8 to <=30Ω/(square) after the capacitor element is immersed in the insulating oil. Consequently, the adhesion between the conductive thin metallic film 8 and plastic film 7 is improved.
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