| 摘要 |
PURPOSE: A manufacturing method of an organic EL device is provided to arrange liquid in desired areas with uniform thickness in the areas in liquid arrangement process for a luminescence layer or hole transport layer. CONSTITUTION: To manufacture an organic EL device, SiO2 thin film pattern(3) having an opening(3a) is formed on an ITO electrode(2). An organic ultra thin film pattern(41) having an opening(4b) is formed on the SiO2 thin film pattern(3). The surface of the organic ultra thin film pattern(41) is liquid repellent. After forming a hole transport layer(61) is formed in the opening(4b), liquid(7) containing material for forming a luminescence layer is ejected onto the opening(4b). The ejected liquid goes into the opening(4b) without stopping on the surface of the organic ultra thin film pattern(41) because of liquid repellent feature. To remove solvent from the liquid(7), the glass substrate(1) is heated.
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