| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrolysis equipment, in which bubbles are not trapped and accumulated between an electrolyte impregnation material (a porous body) and a substrate to be treated, in spite of having a structure in which the electrolyte is supplied from the opposite side of the electrolyte impregnation material against the substrate into the impregnation material and is filled between an electrolyte impregnation material and a substrate. SOLUTION: This electrolysis equipment is aimed at electrolysis of the substrate to be treated W in the electrolyte filled between the substrate W and an anode 38. Electrolyte conduction holes 39 are provided in anode 38 for supplying the electrolyte into the electrolyte impregnation material 40 consisting of a water retaining material, which is joined to the face of the substrate W side of the anode 38, and tubes 45 consisting of the corrosion resistant material to the electrolyte are inserted into of the electrolyte conduction hole 39, then the supplied electrolyte in the electrolyte impregnation material 40 through the tubes 45 is supplied in between the electrolyte impregnation material and the substrate from the opposite side of the electrolyte impregnation materials 40.
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