发明名称 |
WASHING AND DRYING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a washing and drying device capable of surely washing an outer peripheral edge face of a material to be treated and uniformly drying to a degree that a liquid is drained without leaving a drop on the outer peripheral edge face of the material. SOLUTION: The washing and drying device is provided with a plurality of pins 2 which hold outer peripheral edges of the plate material 1 to be treated on a rotary table 4 which is rotatable and a pin head 3 which is mounted at the end of the pin 2 to grasp the outer peripheral edge of the material and has a penetrated hole for drainage at the side in contact with of the outer peripheral edge of the material 1. Each of rotating plural pins 2 moves dividedly while grasping the material 1 and alternately grasps the outer peripheral edge of the material when washing and drying.
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申请公布号 |
JP2001321733(A) |
申请公布日期 |
2001.11.20 |
申请号 |
JP20000142187 |
申请日期 |
2000.05.15 |
申请人 |
SHIMADA PHYS & CHEM IND CO LTD |
发明人 |
TACHIHABA YOSHITO;SHIMADA KIYOSHI;OTSUBO TETSURO;NOBATA HIROYOSHI;ABE YUSUKE |
分类号 |
B08B3/08;B08B3/02;H01L21/304;(IPC1-7):B08B3/08 |
主分类号 |
B08B3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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