发明名称 FAST RECOVERY DIODE AND METHOD FOR ITS MANUFACTURE
摘要 A soft recovery diode is made by first implanting helium into the die to a location below the P/N junction and the implant annealed. An E-beam radiation process then is applied to the entire wafer and is also annealed. The diode then has very soft recovery characteristics without requiring heavy metal doping.
申请公布号 WO0197258(A2) 申请公布日期 2001.12.20
申请号 WO2001US17381 申请日期 2001.05.30
申请人 INTERNATIONAL RECTIFIER CORPORATION 发明人 FRANCIS, RICHARD;NG, CHIU
分类号 H01L21/322;H01L21/329;H01L29/861 主分类号 H01L21/322
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