PLASMA REACTOR AND APPARATUS INCLUDING THE SAME

摘要

PURPOSE: A plasma reactor and an apparatus including the same are provided to process simultaneously various types of samples by simplifying a plasma reactor and its apparatus. CONSTITUTION: A plasma reactor and an apparatus including the same are formed with a reactor portion(7), a carrier gas inflow portion(2), a vacuum portion(3), a plasma matching network, and a magnetic agitator portion(6). The reactor portion(7) is formed with a pyrex glass tube. A bottom portion of the reactor portion(7) has an elliptic shape. The plasma matching network is formed with an automatic matching network by considering floating particles of plasma state and rotary velocity of a magnetic bar(5). The vacuum portion(3) is formed with a rotary pump and a diffusion pump. The magnetic stirrer portion(6) is used for floating the particles within the reactor portion(7) by forming a magnetic field. An argon gas, an oxygen gas, a hydrogen gas, and a fluorine gas are used as a carrier gas.