发明名称 |
SINGLE CRYSTAL GROWTH METHOD |
摘要 |
PROBLEM TO BE SOLVED: To secure the growth of a single crystal having a large diameter and high quality by preventing the deformation of a quartz crucible producible by a conventional production process to stably grow the single crystal. SOLUTION: The growth of the single crystal is carried out by using the quartz crucible in which the relation of the viscosity coefficientη(poise) of a quartz which composes the straight body of the quartz crucible to the thickness (h) (cm) of the straight body satisfies the formula, log (h2η)>=9.4 at 1,550 deg.C which is the temperature when seeding, and further setting the temperature of the straight body ranging from the upper end of the crucible to the position of 3 cm above a melted liquid level in the crucible to be below 1,650 deg.C when seeding in the growth of single crystal.
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申请公布号 |
JP2002047092(A) |
申请公布日期 |
2002.02.12 |
申请号 |
JP20000231703 |
申请日期 |
2000.07.31 |
申请人 |
SUPER SILICON KENKYUSHO:KK |
发明人 |
KURAMOTO MAKOTO;TAKANO KIYOTAKA |
分类号 |
C30B29/06;C30B15/10;(IPC1-7):C30B29/06 |
主分类号 |
C30B29/06 |
代理机构 |
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地址 |
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