发明名称 SINGLE CRYSTAL GROWTH METHOD
摘要 PROBLEM TO BE SOLVED: To secure the growth of a single crystal having a large diameter and high quality by preventing the deformation of a quartz crucible producible by a conventional production process to stably grow the single crystal. SOLUTION: The growth of the single crystal is carried out by using the quartz crucible in which the relation of the viscosity coefficientη(poise) of a quartz which composes the straight body of the quartz crucible to the thickness (h) (cm) of the straight body satisfies the formula, log (h2η)>=9.4 at 1,550 deg.C which is the temperature when seeding, and further setting the temperature of the straight body ranging from the upper end of the crucible to the position of 3 cm above a melted liquid level in the crucible to be below 1,650 deg.C when seeding in the growth of single crystal.
申请公布号 JP2002047092(A) 申请公布日期 2002.02.12
申请号 JP20000231703 申请日期 2000.07.31
申请人 SUPER SILICON KENKYUSHO:KK 发明人 KURAMOTO MAKOTO;TAKANO KIYOTAKA
分类号 C30B29/06;C30B15/10;(IPC1-7):C30B29/06 主分类号 C30B29/06
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