| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of monitoring an ultraviolet lamp in an ultraviolet cleaning device to monitor the change of quantity of light of the ultraviolet lamp in the ultraviolet cleaning device to keep the light intensity of the ultraviolet lamp constant. SOLUTION: In the method of monitoring the ultraviolet lamp in the ultraviolet cleaning device for composing and cleaning organic contaminants stuck to the surface of a substrate to be cleaned by irradiating the contaminants with the light emitted from the ultraviolet lamp, a collecting electrode and a reference electrode, which are successively arranged on the back surface side of the ultraviolet lamp, are provided and the change of quantity of light of the ultraviolet lamp is monitored with a photoelectron current detected by the collecting electrode to keep the light intensity of the ultraviolet lamp constant and to perform the replacement of the ultraviolet lamp in a precise period.
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