METALLIC OXIDE THIN FILM AND METHOD OF FORMING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a uniform metallic oxide thin film free from cracks on a substrate, and provide a metallic oxide thin film using the same. SOLUTION: A metallic oxide oligomer-unsaturated organic compound solvent complex-containing solution prepared by a solution containing metallic salts and an unsaturated organic compound solvent is adhered to a substrate, and thereafter the unsaturated organic compound solvent of 20% or more in the adherent solution is removed by means of substantially preventing diffusion and mixing of between substrate constituents and the metallic oxide oligomer, and heat treatment is then conducted at temperature of 100-1,300 deg.C for 1-24 hours to form the metallic oxide film on the substrate.