VERTICAL CAVITY SURFACE EMITTING LASER IN BODY WITH MICRO LENS

摘要

PURPOSE: A vertical cavity surface emitting laser(VCSEL) in a body with a micro lens is provided, where a position of the micro lens is varied on a laser output part. CONSTITUTION: A vertical cavity surface emitting laser part(100) emits a laser to a stacked direction of a semiconductor epilayer, and a micro lens(190) is formed with a material transmitting a light emitted from the vertical cavity surface emitting laser part. And a varying part varies an interval between the micro lens and the vertical cavity surface emitting laser part by being located between them. The vertical cavity surface emitting laser part comprises a substrate(101), a bottom electrode(155) formed on a bottom surface of the substrate, a bottom reflector layer(110) and an active layer(120) and a top reflector layer(140) stacked in sequence on the substrate, and a top electrode(151) formed on a region except a region for emitting the laser light.