| 摘要 |
A method for fabricating microstructures. The invention causes a FIB to impinge a substrate material at a first location to modify a first portion of the substrate material. The FIB is adjusted as necessary to impinge the substrate material at a second location to modify a second portion of the substrate material. The first portion, the second portion, and a third portion of the substrate material are exposed to an enchant so as to remove only the third portion of the substrate material, thereby fabricating one or more microstructures. Optional steps can be added in various combinations and permutations to repeat steps of the process, to coat or deposit other materials, and to modify or remove components of the fabricated one or more microstructures. |
