METHOD AND APPARATUS FOR PHASE COMPENSATION OF POSITION SIGNAL AND DETECTION SIGNAL IN SCANNING MICROSCOPIC METHOD AND SCANNING MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To propose plural realizable means capable of easily correcting the time lag between a position signal and a detection signal to users. SOLUTION: This method includes steps of: forming the position signal from the position of a beam deflector (7); and forming the detection signal associated with the position signal from light (17) coming from a sample (15). The position signal and the detection signal are transmitted to a processor (23). The correction values are determined in the processor (23). The correction values are transmitted to a computer (34) in order to compensate the time lag between the position signal and the detection signal.