| 摘要 |
PROBLEM TO BE SOLVED: To provide a reference light source for stabilizing a wavelength in a practical fluorine laser device when the fluorine laser device is used as a light source of a projection aligner for a stepper or scan exposure, etc. SOLUTION: This reference light source for fluorine laser has an emission spectrum near to a laser-light wavelength emitted from a fluorine laser device and is used to stabilize the oscillated wavelength of the laser light emitted therefrom by using the emission spectral line. It is provided with a window member 3 on one end of an almost cylindrical discharging container 1 that radiates a vacuum ultraviolet light, and the container 1 contains at least either of bromine molecular and bromine compound as a light emitting substance, as well as a rare gas as a starting buffer gas. Furthermore, a pair of band-like electrodes 4a and 4b are arranged on the outer surface of the container 1, apart from each other in the lengthwise direction of the container 1 in a manner that its side is surrounded. |
