| 发明名称 |
DOMED WAFER REACTOR VESSEL WINDOW WITH REDUCED STRESS AT ATMOSPHERIC AND ABOVE ATMOSPHERIC PRESSURES |
| 摘要 |
A thermal reactor having a wafer chamber for containing at least one semiconductor wafer during processing. The thermal reactor contains a quartz window having an inward bow defining a concave outside surface.
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| 申请公布号 |
US2002066408(A1) |
申请公布日期 |
2002.06.06 |
| 申请号 |
US19990426218 |
申请日期 |
1999.10.22 |
| 申请人 |
ANDERSON ROGER N. |
发明人 |
ANDERSON ROGER N. |
| 分类号 |
C23C16/48;C30B25/08;H01L21/205;(IPC1-7):B05C11/00;H01L21/302;H01L21/461 |
主分类号 |
C23C16/48 |
| 代理机构 |
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