Apparatus and method to read output information from a backside of a silicon device

摘要

Photon emissions from a backside of a silicon device or integrated circuit are detected. The photon emissions can be used for a technique to read output information from the silicon device, as the photon emissions from part of an output signal path for the silicon device. The emitted photons pass through openings of a mask positioned over the backside of the silicon device, and are detected by a photodetector array. Electrical signals are generated from the detected photons, and can be converted to optical signals for subsequent transmission from optical transmitters coupled to the photodetector.