High accuracy blast processing method and high accuracy blast processing apparatus

摘要

In a high accuracy blast processing method of the present invention which is a blast processing method for processing a substrate by injecting an injection material from a nozzle by compressed air, injection of the injection material is either intermittent injection for repeating the injection and injection stop at short intervals or a combination of the intermittent injection and continuous injection. By doing so, even if a processing progresses, processing efficiency is not deteriorated and a non-processing target region is not damaged even without using a mask. A high accuracy blast processing apparatus of the present invention consists of a nozzle unit forcedly feeding the injection material to the nozzle by the compressed air and a work table moving the substrate horizontally and vertically. A solenoid valve for injecting and stopping the injection material and a control unit outputting an intermittent operating signal to the solenoid valve are connected to the nozzle unit.