发明名称 Position detecting system and device manufacturing method using the same
摘要 A position detecting system for producing relative positional information related to first and second objects, is wherein the system includes a light projecting device for projecting light toward the first and second objects disposed opposed to each other and having physical optic elements, the light projecting device being capable of projecting lights of different wavelengths, a light detecting device for detecting light emitted from the light projecting device and being influenced by both of the physical optic elements of the first and second objects, wherein relative positional information related to the first and second objects is produced on the basis of the detection by the light detecting device, and a spacing setting device for changing the spacing between the first and second objects in accordance with a wavelength of light to be projected by the light projecting device.
申请公布号 US6421124(B1) 申请公布日期 2002.07.16
申请号 US19980203584 申请日期 1998.12.02
申请人 CANON KABUSHIKI KAISHA 发明人 MATSUMOTO TAKAHIRO;SENTOKU KOICHI
分类号 G01B11/00;G03F9/00;H01L21/027;(IPC1-7):G01B11/00 主分类号 G01B11/00
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