| 摘要 |
PURPOSE: An apparatus for generating a Low Temperature Plasma at atmospheric pressure is provided to obtain plasma with low temperature and high density by suppressing a transition effect from plasma to arch between two electrodes. CONSTITUTION: An apparatus for generating a Low Temperature Plasma at atmospheric pressure includes a power supply(6), a pair of electrodes(1,2) facing each other, a discharging gap(7) and a conductive electrode(5) having protrusions in the dielectric discharging gap(7). One of the electrodes(1,2) is connected to the power supply(6) and the other electrode is connected to a ground. The discharging gap(7) is formed on one of a dielectric materials(3,4) installed with facing each other and having a thickness of 25um - 10mm at a surface which is facing to the electrodes(1,2). An alternative or a direct electric field of 1-10 KV/cm with a frequency bandwidth 50 Hz-10 Hz is applied to the electrodes(1,2,5) through the power supply(6) and a reactive gas is supplied thereto through the electrodes(1,2,5).
|
