| 摘要 |
A method for producing reliable contacts in microelectronic devices and contacts produced thereby are provided. In one embodiment of the invention, a first conductive layer is formed over a first dielectric layer. The first conductive layer contains a pattern etched therein. A second dielectric layer is deposited over the first conductive layer and a via is etched therein over the pattern, thus exposing a portion of the pattern and the first conductive layer. The structure is then further etched to remove a portion of the first dielectric layer using the exposed portions of the first conductive layer as a mask. The structure is then subject to an isotropic etch to create undercuts in the first dielectric layer underneath the exposed portions of the first conductive layer. A conductive material can then be deposited into the via to fill the undercut, thus contacting the first conductive material on the exposed top, sides, and underside of the layer to produce a highly reliable contact. This technique is also adapted to create vias that are used to connect three or more conductive layers.
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