VACUUM DEVICE MADE OF ALUMINUM ALLOY

摘要

PROBLEM TO BE SOLVED: To provide a vacuum device made of an aluminum alloy exhibiting a uniform baking temperature and excellent baking efficiency even though its vacuum container is large-sized. SOLUTION: This vacuum device made of the aluminum alloy is provided with a vacuum container 3 which is made of the aluminum alloy and which has cathodes for discharging electrons by field emission filled in the micropores of an anodic oxide film 33 formed on its vacuum side surface, a terminal for the cathode for applying a voltage to the cathode, and a power source 6 connected to the terminal 41 for the cathode. The terminal for the cathode is arranged at almost the center part of individual parts formed by dividing the atmosphere-side surface of the vacuum container made of the aluminum alloy into roughly equal areas.