| 摘要 |
PROBLEM TO BE SOLVED: To prepare a high-reflection and low-resistance thin film which is useful as a reflection film, reflection electrodes, electrode, wiring, or the like, of a flat panel display(FPD), has high reflectivity, is stable, is low in electric resistance and is, in addition, excellent in film adhesion property and durability as well and a sputtering target usable for deposition of this thin film. SOLUTION: The high-reflection and low-resistance thin film is the film for forming the electrode, wiring, reflection film or reflection electrode of the FPD and is substantially formed of a ternary alloy of Ag-Ru-Au, in which the average reflectivity in a visible light region when the film thickness is 280 nm is >=88%, the difference in the magnitude of the reflectivity is within 10% and the electric resistivity is <=14μΩcm.
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